Assignee
HOSOYA MORIO
JP·4 granted patents·11 citations·filing 2006–2010
Top patents by PatentIndex Score
4 records- 0184US8329361B2Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective maskHOSOYA MORIO·Filed 2010·Granted Dec 11, 2012·4 cites·12 claims
- 0281US8546047B2Reflective mask blank and method of manufacturing a reflective maskHOSOYA MORIO·Filed 2009·Granted Oct 1, 2013·7 cites·13 claims
- 0339US8081384B2Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective maskHOSOYA MORIO·Filed 2006·Granted Dec 20, 2011·0 cites·8 claims
- 0438US8389184B2Reflective mask blank and method of manufacturing a reflective maskHOSOYA MORIO·Filed 2010·Granted Mar 5, 2013·0 cites·8 claims
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