Assignee

HOSOYA MASANORI

CN·1 granted patent·3 citations·filing 2011–2011

Technology mixG03F1 H01J1 H10P1

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0169US8569178B2Plasma processing method and plasma processing apparatusHOSOYA MASANORI·Filed 2011·Granted Oct 29, 2013·3 cites·9 claims

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