Assignee
HORIE TADASHI
JP·1 granted patent·2 pending applications·0 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0128US8178445B2Substrate processing apparatus and manufacturing method of semiconductor device using plasma generationHORIE TADASHI·Filed 2010·Granted May 15, 2012·0 cites·15 claims
- 0213US2012070913A1Method of manufacturing a semiconductor device and substrate processing apparatusHORIE TADASHI·Filed 2011·Application pending·0 cites
- 0313US2013295768A1Substrate processing apparatus and method of manufacturing semiconductor deviceHORIE TADASHI·Filed 2011·Application pending·0 cites
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