Assignee
HIROSHIMA MASAHITO
JP·2 granted patents·1 pending application·5 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0172US8124303B2Phase shift mask and method for manufacturing the same, and method for manufacturing integrated circuitHIROSHIMA MASAHITO·Filed 2009·Granted Feb 28, 2012·3 cites·8 claims
- 0250US8090188B2Apparatus including defect correcting system which repeats a correcting of a reticle pattern defect and a correcting method using the apparatusHIROSHIMA MASAHITO·Filed 2007·Granted Jan 3, 2012·2 cites·19 claims
- 0347US2012058421A1Phase shift mask and method for manufacturing the same, and method for manufacturing integrated circuitHIROSHIMA MASAHITO·Filed 2011·Application pending·0 cites
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