Assignee
HAYASHI TOKUTAROU
JP·2 granted patents·10 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0181US8781787B2Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying methodHAYASHI TOKUTAROU·Filed 2011·Granted Jul 15, 2014·9 cites·20 claims
- 0257US9240337B2Substrate transport method, substrate transport apparatus, and coating and developing systemHAYASHI TOKUTAROU·Filed 2012·Granted Jan 19, 2016·1 cites·13 claims
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