Assignee
HARA MASAMICHI
JP·5 granted patents·10 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0182US9404180B2Deposition deviceHARA MASAMICHI·Filed 2011·Granted Aug 2, 2016·6 cites·6 claims
- 0274US8518181B2Film forming apparatus and film forming methodHARA MASAMICHI·Filed 2005·Granted Aug 27, 2013·2 cites·24 claims
- 0371US9202728B2Substrate mounting mechanism, and substrate processing apparatusHARA MASAMICHI·Filed 2012·Granted Dec 1, 2015·2 cites·10 claims
- 0454US9062374B2Method for film formation, apparatus for film formation, and computer-readable recording mediumHARA MASAMICHI·Filed 2009·Granted Jun 23, 2015·0 cites·12 claims
- 0549US8273409B2Method for film formation, apparatus for film formation, and computer-readable recording mediumHARA MASAMICHI·Filed 2011·Granted Sep 25, 2012·0 cites·5 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →