Assignee

GOTOU ISAMU

JP·2 granted patents·5 citations·filing 2009–2010

Technology mixB24B1 H10P1

Top patents by PatentIndex Score

2 records

0169US8334222B2Semiconductor wafer processing method and apparatusGOTOU ISAMU·Filed 2009·Granted Dec 18, 2012·5 cites·6 claims
0235US8387902B2Recycling method and recycling apparatus of slurry for use in wafer polishingGOTOU ISAMU·Filed 2010·Granted Mar 5, 2013·0 cites·6 claims

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