Assignee
GODYAK VALERY
6 granted patents·69 citations·filing 2007–2013
Top patents by PatentIndex Score
6 records- 0194US10083817B1Linear remote plasma sourceGODYAK VALERY·Filed 2013·Granted Sep 25, 2018·19 cites·20 claims
- 0291US8992725B2Plasma reactor with inductie excitation of plasma and efficient removal of heat from the excitation coilGODYAK VALERY·Filed 2007·Granted Mar 31, 2015·13 cites·13 claims
- 0390US7863582B2Ion-beam sourceGODYAK VALERY·Filed 2008·Granted Jan 4, 2011·13 cites·9 claims
- 0482US8920600B2Inductive plasma source with high coupling efficiencyGODYAK VALERY·Filed 2007·Granted Dec 30, 2014·13 cites·19 claims
- 0581US8444870B2Inductive plasma source with high coupling efficiencyGODYAK VALERY·Filed 2009·Granted May 21, 2013·11 cites·11 claims
- 0645US8487544B2Power splitter circuit for electrodeless lampGODYAK VALERY·Filed 2010·Granted Jul 16, 2013·0 cites·20 claims
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