Assignee
FILMETRICS INC
US·12 granted patents·532 citations·filing 1998–2017
Top patents by PatentIndex Score
12 records- 0196US6204922B1Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sampleFILMETRICS INC·Filed 1998·Granted Mar 20, 2001·216 cites·21 claims
- 0295US6172756B1Rapid and accurate end point detection in a noisy environmentFILMETRICS INC·Filed 1998·Granted Jan 9, 2001·188 cites·15 claims
- 0394US7151609B2Determining wafer orientation in spectral imagingFILMETRICS INC·Filed 2006·Granted Dec 19, 2006·30 cites·37 claims
- 0482US6184985B1Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sourcesFILMETRICS INC·Filed 1998·Granted Feb 6, 2001·68 cites·20 claims
- 0577US7502119B2Thin-film metrology using spectral reflectance with an intermediate in-line referenceFILMETRICS INC·Filed 2007·Granted Mar 10, 2009·5 cites·26 claims
- 0676US7095511B2Method and apparatus for high-speed thickness mapping of patterned thin filmsFILMETRICS INC·Filed 2001·Granted Aug 22, 2006·21 cites·17 claims
- 0775US10247605B2Automatic real-time wavelength calibration of fiber-optic-based spectrometersFILMETRICS INC·Filed 2013·Granted Apr 2, 2019·3 cites·87 claims
- 0862US8908177B2Correction of second-order diffraction effects in fiber-optic-based spectrometersFILMETRICS INC·Filed 2013·Granted Dec 9, 2014·1 cites·31 claims
- 0956US10571615B2High-lifetime broadband light source for low-power applicationsFILMETRICS INC·Filed 2016·Granted Feb 25, 2020·0 cites·62 claims
- 1045US10724900B2Determining focus condition in spectral reflectance systemFILMETRICS INC·Filed 2016·Granted Jul 28, 2020·0 cites·36 claims
- 1143US10620420B2Optical system for use with microscopeFILMETRICS INC·Filed 2016·Granted Apr 14, 2020·0 cites·21 claims
- 1240US11099068B2Optical instrumentation including a spatially variable filterFILMETRICS INC·Filed 2017·Granted Aug 24, 2021·0 cites·45 claims
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