Assignee
ELIONIX INC
JP·3 granted patents·25 citations·filing 1983–2014
Top patents by PatentIndex Score
3 records- 0174US6605811B2Electron beam lithography system and methodELIONIX INC·Filed 2001·Granted Aug 12, 2003·18 cites·8 claims
- 0262US9410984B2Surface force measuring method and surface force measuring apparatusELIONIX INC·Filed 2014·Granted Aug 9, 2016·2 cites·10 claims
- 0330US4554452AMethod and apparatus for handling charged particle beamELIONIX INC·Filed 1983·Granted Nov 19, 1985·5 cites·6 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →