Assignee

DS2 INC

US·1 granted patent·27 citations·filing 2009–2009

Technology mixB82Y1 G03F1 G06F1 H01J1 Y02P1 Y10S1

Top patents by PatentIndex Score

1 record

0186US7981575B2Method for optical proximity correction of a reticle to be manufactured using variable shaped beam lithographyDS2 INC·Filed 2009·Granted Jul 19, 2011·27 cites·32 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →