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DE4 patents
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US4943362AJul 24, 1990
Sputtering target for producing optically transparent layers and method of manufacturing these targets
DEMETRON20 citations72
US4236948ADec 2, 1980
Process for doping semiconductor crystals
DEMETRON19 citations71
US4803046AFeb 7, 1989
Method for making targets
DEMETRON7 citations70
US4466940AAug 21, 1984
Multicomponent alloy for sputtering targets
DEMETRON16 citations65