Assignee

CORNWELL RESEARCH FOUNDATION I

1 granted patent·11 citations·filing 1974–1974

Technology mixG02B1 G03F1 H01J1

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0154US3961102AScanning electron microscope fabrication of optical gratingsCORNWELL RESEARCH FOUNDATION I·Filed 1974·Granted Jun 1, 1976·11 cites·15 claims

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