Assignee
CLEAN FACTOMATION INC
KR·3 granted patents·4 citations·filing 2014–2019
Top patents by PatentIndex Score
3 records- 0170US10796937B2Equipment front end moduleCLEAN FACTOMATION INC·Filed 2019·Granted Oct 6, 2020·2 cites·13 claims
- 0263US11380567B2Wafer purging-type shelf assembly and buffer module having the sameCLEAN FACTOMATION INC·Filed 2019·Granted Jul 5, 2022·1 cites·7 claims
- 0356US9550219B2Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the sameCLEAN FACTOMATION INC·Filed 2014·Granted Jan 24, 2017·1 cites·13 claims
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