Assignee
CHEN YANFENG
US·2 granted patents·5 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0172US8871048B2Flexible nanoimprint mold, method for fabricating the same, and mold usage on planar and curved substrateCHEN YANFENG·Filed 2009·Granted Oct 28, 2014·3 cites·17 claims
- 0264US9018100B2Damascene process using PVD sputter carbon film as CMP stop layer for forming a magnetic recording headCHEN YANFENG·Filed 2010·Granted Apr 28, 2015·2 cites·21 claims
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