Assignee
BUDACH MICHAEL
DE·2 granted patents·7 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0181US8674329B2Method and apparatus for analyzing and/or repairing of an EUV mask defectBUDACH MICHAEL·Filed 2011·Granted Mar 18, 2014·4 cites·10 claims
- 0273US8316698B2Determining a repairing form of a defect at or close to an edge of a substrate of a photo maskBUDACH MICHAEL·Filed 2009·Granted Nov 27, 2012·3 cites·18 claims
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