Assignee

BALDWIN TERESA

US·1 granted patent·20 citations·filing 2002–2002

Technology mixC03C1 C08G1 C08K1 C08L1 C09D1 G02B1

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0173US9069133B2Anti-reflective coating for photolithography and methods of preparation thereofBALDWIN TERESA·Filed 2002·Granted Jun 30, 2015·20 cites·20 claims

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