Assignee

BAKKE THOR

NO·1 granted patent·8 citations·filing 2010–2010

Technology mixG01J1 G02B1 H01L1 H10N1

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0181US9250418B2Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membraneBAKKE THOR·Filed 2010·Granted Feb 2, 2016·8 cites·10 claims

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