Assignee
ASML US LLC
US·4 granted patents·5 citations·filing 2017–2018
Top patents by PatentIndex Score
4 records- 0184US10656530B2Application of FreeForm MRC to SRAF optimization based on ILT mask optimizationASML US LLC·Filed 2018·Granted May 19, 2020·3 cites·20 claims
- 0272US10578963B2Mask pattern generation based on fast marching methodASML US LLC·Filed 2018·Granted Mar 3, 2020·1 cites·20 claims
- 0367US10705420B2Mask bias approximationASML US LLC·Filed 2018·Granted Jul 7, 2020·1 cites·20 claims
- 0458US11119401B2Simulating near field image in optical lithographyASML US LLC·Filed 2017·Granted Sep 14, 2021·0 cites·21 claims
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