Assignee
ASAI KAZUHIDE
JP·7 granted patents·1 pending application·9 citations·filing 2009–2012
Top patents by PatentIndex Score
8 records- 0179US9581996B2Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing processASAI KAZUHIDE·Filed 2012·Granted Feb 28, 2017·5 cites·17 claims
- 0263US8538571B2Substrate processing system, group managing apparatus, and method of analyzing abnormal stateASAI KAZUHIDE·Filed 2010·Granted Sep 17, 2013·1 cites·11 claims
- 0361US8447424B2Substrate processing system and group management systemASAI KAZUHIDE·Filed 2010·Granted May 21, 2013·1 cites·8 claims
- 0460US8329479B2Information managing method, information managing apparatus and substrate processing systemASAI KAZUHIDE·Filed 2009·Granted Dec 11, 2012·2 cites·6 claims
- 0549US8948899B2Substrate processing system, substrate processing apparatus and display method of substrate processing apparatusASAI KAZUHIDE·Filed 2011·Granted Feb 3, 2015·0 cites·8 claims
- 0642US2012226475A1Substrate processing system, management apparatus, data analysis methodASAI KAZUHIDE·Filed 2012·Application pending·0 cites
- 0741US8639367B2Substrate processing systemASAI KAZUHIDE·Filed 2010·Granted Jan 28, 2014·0 cites·9 claims
- 0839US9142436B2Statistical analysis method and substrate process systemASAI KAZUHIDE·Filed 2011·Granted Sep 22, 2015·0 cites·6 claims
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