Assignee

ANDO YASUNORI

JP·2 granted patents·2 citations·filing 2010–2012

Technology mixC23C2 H10P2 H01J1 H01L1 H05H1 H10D1

Top patents by PatentIndex Score

2 records

0166US8394232B1Plasma processing apparatusANDO YASUNORI·Filed 2012·Granted Mar 12, 2013·2 cites·8 claims
0239US9058982B2Silicon oxynitride film and method for forming same, and semiconductor deviceANDO YASUNORI·Filed 2010·Granted Jun 16, 2015·0 cites·4 claims

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