Assignee

AMTECH SYSTEMS

US·1 granted patent·46 citations·filing 1991–1991

Technology mixC23C1 C30B1 F27D1

Top patents by PatentIndex Score

1 record

0189US5118286AClosed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafersAMTECH SYSTEMS·Filed 1991·Granted Jun 2, 1992·46 cites·9 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →