Assignee

AIR LIQUIDE ELECTRONICS LABEIL

US·1 granted patent·30 citations·filing 1998–1998

Technology mixB01F1 C01B1 C01C1 C01P1

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0164US6183720B1Process and apparatus for producing high-purity chemicals for the microelectronics industryAIR LIQUIDE ELECTRONICS LABEIL·Filed 1998·Granted Feb 6, 2001·30 cites·18 claims

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